● Experimental analysis, scientific research and development
● Integrated circuit manufacturing, MAMS
● Single crystal silicon, polysilicon and silicon epitaxy Low leds, TFT
● Gallium nitride, silicon carbide, etc
● Gas purge, welding
● Ammonia purifier is applied in scientific research institutes
● Small terminal hydrogen purifier for high-tech instrument companies
● Use at room temperature
● Repeated regeneration
● High removal depth of impurities
● Built-in micron filter, unique structure, prevent clogging
● Various models can be customized according to user needs
● Low usage cost
|
8NP Series conventional model parameter table |
||||||||||||
|
Applicable gas |
N2, H2, O2, Ar, He, NH 3 , SiH4, HCL |
|||||||||||
|
Processing capacity (L/min) |
5 |
10 |
20 |
30 |
50 |
100 |
150 |
200 |
300 |
500 |
800 |
1000 |
|
Length (mm) |
120 |
150 |
225 |
220 |
200 |
385 |
500 |
360 |
508 |
760 |
600 |
716 |
|
diameter |
2' |
2.5' |
3' |
4' |
||||||||
|
Inlet/outlet connector |
1/4 VCR |
1/2 VCR |
||||||||||
|
Working pressure (Mpa) |
1 |
|||||||||||
|
Maximum gas pressure difference (Mpa) |
0.1 |
|||||||||||
|
Purification index |
Single impurity ＜ 1ppb |
|||||||||||
|
Service life |
Six months (return to factory for regeneration) |
|||||||||||
|
Ø O Special models can be customized according to customer requirements. |
||||||||||||
9NP series conventional model parameter
table
Applicable gas
N2, H2, O2, Ar, He, NH
3
, SiH4, HCL
Processing capacity (L/min)
5
10
20
30
50
100
150
200
300
500
800
1000
Length (mm)
130
180
275
260
380
500
435
550
780
600
900
1100
diameter
2'
2.5'
3'
4'
6'
Inlet/outlet connector
1/4 VCR
1/2 VCR
Working pressure (Mpa)
1
Maximum gas pressure difference (Mpa)
0.1
Purification index
Single impurity
＜
0.1ppb
Service life
Six months (return to factory for
regeneration)
Ø
O
Special models can be customized according
to customer requirements.
ADD：No. 18, Xinyi Street, Ganjingzi District, Dalian
TEL：13304096368 0411-83700366
